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2017传感器与MEMS国际会议组委会
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Steffen Diez

Steffen Diez

Heidelberg Instruments Mikrotechnik GmbH

Member of Technical Board, Application Lab Manager



Mr Steffen Diez received his Diploma of Electrical Engineering from the Karlsruhe University in 1999. In 2000 he joined the Conversion Software group of Heidelberg Instruments, becoming its leader in 2003. From 2005-2010 he worked as an R&D Manager for PCB Exposure Systems. In this period new SLM based Light Engines were introduced for the first time in Heidelberg’s products. During a one-year stay in Japan, he was responsible for Technical Sales and Business Development in Asia. After returning to Germany he worked on DMD based Direct Write Lithography systems. In 2012 he successfully introduced the μPG501 into the market, receiving the Prism Award in 2013.

Since 2012 he has been leading the Process and Application Labs in Heidelberg and Japan. In 2012 he was also elected by the shareholders to join the Technical Board, a team of technical experts with the function of a CTO.

In 2014 Mr. Diez presented a concept for a new direct write lithography tool, with the target to replace Mask Aligners in Research and Development and Low Volume Production. He has accomplished this concept and introduced a new product line of Maskless Aligners in 2015.


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